Plasma cleaning is a universally applied environmentally benign process used in numerous manufacturing processes for removal of sub-micron contamination.
Dry processing is advantageous in a wide variety of manufacturing operations for removal of many types of contamination including organic residues, polymer coatings or build-ups, waxes, metals and metal oxides, fluorine and other halogens.

PM-100 Plasma Treatment System
Designed to be a low-cost, highly effective plasma treatment solution for treating electronic components, printed circuit boards, and medical & life science devices.

PX-Series Plasma Treatment System
PX-Series systems are equipped with an automatic impedance matching network for ease of operation and consistent results.

AP-1000 Plasma Treatment System
PLC controller with touch screen interface provides industrial reliability and ease of use. Complete system enclosure minimizes footprint.

FlexTRAK™ Plasma Treatment System
The FlexTRAK system offers high-throughput capability of up to 480 substrates or process carriers per hour. Its small chamber volume and proprietary process control enable unmatched short cycle times.

XTRAK™ Plasma Treatment System 
With process capability of up to 180 substrates or carriers per hour, the system's SmartTune™ management system provides closed-loop control that reduces tuning to less than one second.

Large Chamber Systems and Custom Plasma Tools
March manufacture a range of large, flexible and custom chamber plasma systems that utilize their proven plasma and control technologies.