Product lines

AP-1000 Plasma System
AP-1000™ Batch Plasma Treatment System - Reliable operation in the most demanding production environments . The March AP-1000 is designed to meet the rigorous demands of 24-hour operation in high-performance manufacturing environments. The system delivers quality plasma treatment along with unmatched reliability, safety and ease of operation and maintenance.

All the components of the system, including the plasma process chamber, the control electronics, the 13.56 MHz power supply with automatic impedance matching network, and the pumping system are housed within an enclosure constructed of rugged powder coated aluminum.

PX-250
PX-250 Plasma Cleaning System . PX-Series systems are equipped with an automatic impedance matching network for ease of operation and consistent results.

PX-500
PX-500 Plasma Cleaning System. Removable shelves can easily be configured to provide downstream or direct plasma.

FlexTRACK System
The FlexTRAK™ system offers short cycle times that quadruple throughput over other available systems. The FlexTRAK™ plasma treatment system is the latest addition to the March TRAK series, and is a highly configurable, high-throughput plasma system. Its universal architecture accommodates a multitude of material handling configurations to support a wide assortment of variable-size form factors. Its small chamber volume and proprietary process control enable unmatched short cycle times, while its slim structure minimizes floor space requirements.

HIGH-THROUGHPUT PROCESSING CAPABILITY

The FlexTRAK system handles a wide variety of product form factors, including boats, carriers, Jedec/Auer® boats, strips, laminates and wafers. Depending on throughput and product form requirements, the system can be configured for magazine- to-magazine processing of single and multiple strips or lead frames, reel-to-reel, wafer processing, and standalone for island-based production environments.

The March TRAK series of gas plasma equipment provides unparalleled treatment uniformity and process consistency. A three-axis symmetrical chamber ensures all positions of the product are treated uniformly, while tight controls over all process parameters ensure repeatable results from product to product.