The PX-Series control module monitors and controls the vacuum and gas flow, chamber pressure, and power level. Up to four mass controllers are connected to a gas-mixing manifold to provide process recipe flexibility.

The microprocessor provides automatic operation, is user friendly, and ensures precise, reproducible process conditions. Cycle duration is controlled by elapsed time and can be downloaded to a PC for further analysis.

Power and Matching Network
Different applications require different configurations and power densities. The PX-Series system is equipped with an automatic impedance matching network for ease of operation and consistent results. RF power supplies are available in either 300 or 600 watts depending on application requirements.

The PX-series is available in two different sizes - the PX-250 and the PX-500.