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March AP-1000 Plasma Treatment System
All the components of the system, including the plasma process chamber, the control electronics, the 13.56 MHz power supply with automatic impedance matching network, and the pumping system are housed within an enclosure constructed of rugged powder coated aluminum. Optional AP-1000 HTP for enhanced productivity The AP-1000 plasma system with HTP (high throughput) shelves combines the reliability and process quality of the AP- 1000 system with the proven benefits of March’s proprietary shelf design. |
Plasma Systems 