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March FlexTRAK™ Plasma Treatment System

FlexTRAK™ Plasma Treatmnet System


The FlexTRAK™ plasma treatment system is the latest addition to the March TRAK series, and is a highly configurable, high-throughput plasma system. Its universal architecture accommodates a multitude of material handling configurations to support a wide assortment of variable-size form factors. Its small chamber volume and proprietary process control enable unmatched short cycle times, while its slim structure minimizes floor space requirements.

HIGH-THROUGHPUT PROCESSING CAPABILITY
The FlexTRAK system handles a wide variety of product form factors, including boats, carriers, Jedec/Auer® boats, strips, laminates and wafers. Depending on throughput and product form requirements, the system can be configured for magazine- to-magazine processing of single and multiple strips or lead frames, reel-to-reel, wafer processing, and standalone for island-based production environments.