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Large Chamber Systems and Custom Plasma Tools

March Plasma manufacture a range of large chamber and custom plasma systems to meet the needs of many demanding industrial applications.

The systems described on this page provide an overview of March technology, however additional system designs are available and we would be happy to provide further information on request.
 

March C-Series
The March C-Series are flexible chamber configuration plasma systems that utilize our proven plasma and controls technologies. Systems can be configured in a variety of ways and can employ either 13.56 mHz or 40 kHz plasma generation technology.

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C-series plasma systems are in use in a large variety of applications in the medical device and industrial industries. The flexible configuration capability has proven to be a key factor in applications for surface treatment of plastic components. Parts can be placed in the plasma chamber on shelves, hanging from racks or, for small pieces, be placed in a rotary tumbling drum.
 

PROVIA™ Plasma Treatment System
Plasma treatment uniformity is a key operational feature in desmear and etchback applications for HDI, Flexible and Rigid circuit board manufacturing technologies.alt

The PROVIA™ platform is completely self-contained, requiring minimal floor space. The vacuum system, plasma chamber, control electronics and 40 kHz power supply are housed in a single enclosure. Full front and rear access allows for convenient service to all interior components. The pump is positioned on rollers for easy removal. No side access is required allowing for even greater floor space savings.

  • Compact system consumes minimal floor space

  • Patented, application specific features

  • Designed and built for HDI, Flex and Rigid Panels


R-Series plasma

The R-Series plasma system from March provides roll-to-roll processing of thick and thin film, fabrics and other web material. Plasma treats filter materials to increase wettability and decrease flow resistance. It also activates surfaces for extruded tubing and provides metal cleaning for wire/thin metal substrate roll applications.

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The plasma vacuum chamber and components are sized to meet customer roll diameter/length and production requirements. The system is designed for easy threading of new rolls with minimal operator interface.