SEC X-eye SF160 Xray Inspection System
- High Performance Open Tube Type X-Ray Inspection Machine for Semiconductor and analysis (Focus : 1μm, tube voltage : 160kv)
- High Resolution High Magnification X-Ray Inspection Machine for Analysis(Max 3200x)
- Auto Area Calculation (Void, Solder ball), Auto-Teaching
- Table AFT (Auto Focus Tracing) Function
- Perfect Navigation Function (Dual Vision Camera)
- 6 Axis(X, Y, Y-aft, Zt, Rotation, Tilt) 3D Inspection Function
- Safest Design Of External Leaking Dose (0.5μsv/h or less)
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ITEMS
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X-eye SF160
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X-eye SF160
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X-eye SF160
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A type
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B type
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C type
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X-Ray Tube
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Focus spot size
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1μm
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1μm
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3μm
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Tube Voltage
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Max. 160kV
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Max. 160kV
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Max. 130kV
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Tube Current
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Max. 0.2mA
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Max. 0.2mA
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Max. 0.2mA
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Max. Power
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32W
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32W
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22W
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Geometric Magnification
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Max. 1,200x
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System Magnification
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Max. 2,800x
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TV System
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Image Intensifier
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4/6inch Digital / Option 2/4inch
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X-Ray CCd Camera
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1.4M / Option 2M
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Gray Scale
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12bit(4096 gray scale)
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Navigation Camera(Option)
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CCD (640x480)
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Personal
Computer
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Monitor Size
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24inch Wide
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CPU
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Pentium 2.13G Dual
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Memory
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2G
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Hard Disk
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80G
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CD-RW Drive
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52X
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Table Robot
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Axis (Servo Moto)
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6 axis
(X, Y, Y-aft, Zt,
Rotation, Tilt)
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4 axis
(X, Y, Zt, Tilt)
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4 axis
(X, Y, Zt, Tilt)
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1 Slice CT Reconstruction
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1 axis (Rotation CT)
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Option
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Option
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Table Size
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510 x 460 mm
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Stroke on X axis
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400 mm
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Stroke on Y axis
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460 mm
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Stroke on Y-alt axis
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270 mm
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Stroke on Zt axis
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200 mm
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Rotation
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Max. 360˚
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Tilt
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Max. 60˚
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Other
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Sample Weight
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5kg
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CT Module
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Option
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Footprint(WxDxH)
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1,400(W)X1,750(D)X1,950(H)mm / 2,000kg
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Anti-vibration
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Option (Pneumatic Vibration Isolation type) / Height : 200mm
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Power Supply
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AC220V ±10%, 50/60Hz
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Externally Leaking Dose
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1uSv/h
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X-Ray Inspection